A two magnetron sputter deposition chamber equipped with an additional ion gun for in situ observation of thin film growth and surface modification by synchrotron radiation scattering
No abstract available.
URL: https://publications.hereon.de/id/25999/
Authors:Schell, N., Borany, J.v., Hauser, J.
Year:2006
In: 9th International Conference on Synchrotron Radiation Instrumentation, SRI 2006
Location:Daegu (ROK)
Date:28.05.-02.07.2006
Cite as: Schell, N.; Borany, J.v.; Hauser, J.: A two magnetron sputter deposition chamber equipped with an additional ion gun for in situ observation of thin film growth and surface modification by synchrotron radiation scattering. In: 9th International Conference on Synchrotron Radiation Instrumentation, SRI 2006. Daegu (ROK), 28.05.-02.07.2006, 2006.
