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journal article

A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry

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  • URL: https://publications.hereon.de/id/22223/
  • Authors:Schwenke, H.,Knoth, J.,Beaven, P.,Kiehn, R.,Buhrz, J.
  • Year:2004
  • In: Spectrochimica Acta B
  • Volume:59
  • Issue:8
  • Pages:1159-1164
  • Type:journal article
  • ISSN: 0584-8547
  • Cite as: Schwenke, H.; Knoth, J.; Beaven, P.; Kiehn, R.; Buhrz, J.: A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry. Spectrochimica Acta B. 2004. vol. 59, no. 8, 1159-1164.
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