SR-TXRF Analysis of Contamination on Wafer Surfaces - Energy-dispersive vs. Wavelength-dispersive Systems

Publication

No abstract available.

URL: https://publications.hereon.de/id/21906/
Authors:Beaven, P., Schwenke, H., Knoth, J.
Year:2002
In: Hamburg Workshop "Application of Synchrotron Radiation in Chemistry-Status and Future"
Location:Hamburg (D)
Date:16.-17.09.2002
Cite as: Beaven, P.; Schwenke, H.; Knoth, J.: SR-TXRF Analysis of Contamination on Wafer Surfaces - Energy-dispersive vs. Wavelength-dispersive Systems. In: Hamburg Workshop "Application of Synchrotron Radiation in Chemistry-Status and Future". Hamburg (D), 16.-17.09.2002, 2002.