Effect of a bell-shaped cover in spin coating process on final film thickness
No abstract available.
URL: https://publications.hereon.de/id/18773/
Authors:Schubert, D.W., Dunkel, T., Pannek, M.
Year:2000
In: 8th International Conference on Polymer Characterization
Location:Denton, TX (USA)
Date:11.-14.01.2000
Cite as: Schubert, D.W.; Dunkel, T.; Pannek, M.: Effect of a bell-shaped cover in spin coating process on final film thickness. In: 8th International Conference on Polymer Characterization. Denton, TX (USA), 11.-14.01.2000, 2000.
